Resultaten visas 1 - 10 / 17
resultat / per sida
Vilka publikationsuppgifter finns i tjänsten?
Publikationens namn
Upphovspersoner
Publikationskanal
År

Reconstruction of Continuous-Profile Blazed Gratings with Optical Scatterometry

Huttunen, A.; Kallioniemi, I.; Saarinen, J.
-2000

Optical Scatterometry of Subwavelength Diffraction Gratings: Neural Networks Approach

Referentgranskad
Kallioniemi, I.; Saarinen, J.; Oja, E.
Applied Optics1998

Artificial neural network assisted spectral scatterometry for grating quality control

Referentgranskad
Öppen tillgång
DOI
10.1088/1361-6501/ad4e52
Mattila, Aleksi; Nysten, Johan; Heikkinen, Ville; Kilpi, Jorma; Korpelainen, Virpi; Hansen, Poul-Eri...
Measurement science and technology2024

Optical scatterometry with neural network model for nondestructive measurement of submicron features

Referentgranskad
Kallioniemi, I.; Saarinen, J.
SPIE1999

Scatterometry analysis of sequentially imprinted patterns: Influence of thermal parameters

Referentgranskad
DOI
10.1016/j.mee.2012.05.048
Gourgon, C.; Ferchichi, A.K.; Pietroy, D.; Haatainen, Tomi; Tesseire, J.
Microelectronic Engineering2012

Evaluation of scatterometry for characterisation of hybrid optics

Lassila Antti, Bodermann Bernd, Turunen Jari, Hansen Poul-Erik, Wurm Matthias, Siitonen Samuli, Saas...
-2012

Joint Research on Scatterometry and AFM Wafer Metrology

Öppen tillgång
DOI
10.1063/1.3657910
Bodermann Bernd, Buhr Egbert, Danzebrink Hans-Ulrich, Bär Markus, Scholze Frank, Krumrey Michael, Wu...
American Institute of Physics2011

Traceable Mueller polarimetry and scatterometry for shape reconstruction of grating structures

Referentgranskad
Öppen tillgång
DOI
10.1016/j.apsusc.2017.02.091
Hansen Poul-Erik, Madsen Morten H, Lehtolahti Joonas, Nielsen Lars
Applied Surface Science2017

Characterization of Diffraction Gratings in a Rigorous Domain with Optical Scatterometry: Hierarchical Neural-Network Model

Referentgranskad
Kallioniemi, Ilkka; Saarinen, J.; Oja, Erkki
Applied Optics1999

Fully polarimetric airborne wind vector scatterometer to support space-borne GNSS-R measurements

DOI
10.1109/IGARSS.2018.8517478
Kainulainen, Juha; Salo, Sampo; Lahtinen, Janne; Molera Calvés, Guifré; Seppänen, Jaakko; Praks, Jaa...
IEEE International Geoscience and Remote Sensing Symposium2018

Reconstruction of Continuous-Profile Blazed Gratings with Optical Scatterometry

2000

Optical Scatterometry of Subwavelength Diffraction Gratings: Neural Networks Approach

Referentgranskad
1998

Artificial neural network assisted spectral scatterometry for grating quality control

Referentgranskad
Öppen tillgång
DOI
10.1088/1361-6501/ad4e52
2024

Optical scatterometry with neural network model for nondestructive measurement of submicron features

Referentgranskad
1999

Scatterometry analysis of sequentially imprinted patterns: Influence of thermal parameters

Referentgranskad
DOI
10.1016/j.mee.2012.05.048
2012

Evaluation of scatterometry for characterisation of hybrid optics

2012

Joint Research on Scatterometry and AFM Wafer Metrology

Öppen tillgång
DOI
10.1063/1.3657910
2011

Traceable Mueller polarimetry and scatterometry for shape reconstruction of grating structures

Referentgranskad
Öppen tillgång
DOI
10.1016/j.apsusc.2017.02.091
2017

Characterization of Diffraction Gratings in a Rigorous Domain with Optical Scatterometry: Hierarchical Neural-Network Model

Referentgranskad
1999

Fully polarimetric airborne wind vector scatterometer to support space-borne GNSS-R measurements

DOI
10.1109/IGARSS.2018.8517478
2018