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Publicationer information ikon
Atomic Layer
Deposition
and Characterization of Dysprosium-Doped Zirconium Oxide Thin Films
Referentgranskad
DOI
10.1002/cvde.201507170
Tamm, Aile; Kozlova, Jekaterina; Arroval, Tonis; Aarik, Lauri; Ritslaid, Peeter; Garcia, Hector; Cas...
Chemical Vapor
Deposition
2015
Publicationer information ikon
Cyclopentadienyl Precursors for the Atomic Layer
Deposition
of Erbium Oxide Thin Films
Referentgranskad
DOI
10.1002/cvde.201407116
Blanquart, Timothee; Kaipio, Mikko; Niinistö, Jaakko; Gavagnin, Marco; Longo, Valentino; Blanquart, ...
Chemical Vapor
Deposition
2014
Publicationer information ikon
Atomic Layer
Deposition
of LiF Thin Films from Lithd and TiF4 Precursors
Referentgranskad
DOI
10.1002/cvde.201207026
Mäntymäki, Miia; Hämäläinen, Jani; Puukilainen, Esa; Munnik, Frans; Ritala, Mikko; Leskelä, Markku
Chemical Vapor
Deposition
2013
Publicationer information ikon
Atomic Layer
Deposition
of TiO2 and ZrO2 Thin Films Using Heteroleptic Guanidinate Precursors
Referentgranskad
DOI
10.1002/cvde.201407115
Kaipio, Mikko; Blanquart, Timothee; Banerjee, Manish; Xu, Ke; Niinistö, Jaakko; Longo, Valentino; Mi...
Chemical Vapor
Deposition
2014
Publicationer information ikon
AlxTayOz Mixture Coatings Prepared Using Atomic Layer
Deposition
for Corrosion Protection of Steel
Referentgranskad
DOI
10.1002/cvde.201207028
Härkönen, Emma; Diaz, Belen; Swiatowska, Jolanta; Maurice, Vincent; Seyeux, Antoine; Fenker, Martin;...
Chemical Vapor
Deposition
2013
Publicationer information ikon
Photocatalytic Properties of WO3/TiO2 Core/Shell Nanofibers prepared by Electrospinning and Atomic Layer
Deposition
Referentgranskad
DOI
10.1002/cvde.201207037
Szilagyi, Imre Miklos; Santala, Eero; Heikkilä, Mikko; Pore, Viljami; Kemell, Marianna; Nikitin, Tim...
Chemical Vapor
Deposition
2013
Publicationer information ikon
Atomic Layer
Deposition
of Groups 4 and 5 Transition Metal Oxide Thin Films:Focus on Heteroleptic Precursors
Referentgranskad
DOI
10.1002/cvde.201400055
Blanquart, Timothee; Niinistö, Jaakko; Ritala, Mikko; Leskelä, Markku
Chemical Vapor
Deposition
2014
Publicationer information ikon
Introduction: basic features and historical development of atomic layer
deposition
Referentgranskad
Niinistö, Jaakko; Niinistö, Lauri
Wiley-VCH Verlag
2012
Publicationer information ikon
Residual stress in thin films made by atomic layer
deposition
Ylivaara, Oili; Puurunen, Riikka
HERALD WG2 Workshop & 4th Annual Seminar of Finnish Center of Excellence in Atomic Layer Deposit...
2016
Publicationer information ikon
Growth Per Cycle in Atomic Layer
Deposition
: A Theoretical Model
Referentgranskad
Puurunen, Riikka
Chemical Vapor
Deposition
2003
Atomic Layer
Deposition
and Characterization of Dysprosium-Doped Zirconium Oxide Thin Films
Referentgranskad
DOI
10.1002/cvde.201507170
2015
Cyclopentadienyl Precursors for the Atomic Layer
Deposition
of Erbium Oxide Thin Films
Referentgranskad
DOI
10.1002/cvde.201407116
2014
Atomic Layer
Deposition
of LiF Thin Films from Lithd and TiF4 Precursors
Referentgranskad
DOI
10.1002/cvde.201207026
2013
Atomic Layer
Deposition
of TiO2 and ZrO2 Thin Films Using Heteroleptic Guanidinate Precursors
Referentgranskad
DOI
10.1002/cvde.201407115
2014
AlxTayOz Mixture Coatings Prepared Using Atomic Layer
Deposition
for Corrosion Protection of Steel
Referentgranskad
DOI
10.1002/cvde.201207028
2013
Photocatalytic Properties of WO3/TiO2 Core/Shell Nanofibers prepared by Electrospinning and Atomic Layer
Deposition
Referentgranskad
DOI
10.1002/cvde.201207037
2013
Atomic Layer
Deposition
of Groups 4 and 5 Transition Metal Oxide Thin Films:Focus on Heteroleptic Precursors
Referentgranskad
DOI
10.1002/cvde.201400055
2014
Introduction: basic features and historical development of atomic layer
deposition
Referentgranskad
2012
Residual stress in thin films made by atomic layer
deposition
2016
Growth Per Cycle in Atomic Layer
Deposition
: A Theoretical Model
Referentgranskad
2003
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