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Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Referentgranskad

Asghar, M. I.; Yli-Koski, M.; Savin, H.; Haarahiltunen, A.; Talvitie, H.; Sinkkonen, Juha

MATERIALS SCIENCE AND ENGINEERING B: ADVANCED FUNCTIONAL SOLID-STATE MATERIALS

2009

(poster) Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Asghar, M. I.; Yli-Koski, M.; Savin, H.; Haarahiltunen, A.; Talvitie, H.; Sinkkonen, Juha

European Materials Research Society Spring Meeting

2008

Predictive modeling of transition metal gettering in silicon

Referentgranskad

Istratov, A. A.; Zhang, P.; Vainola, H.; Huber, W.; Weber, E. R.

Rare Metals

2003

Gettering of iron in silicon by boron implantation

Referentgranskad

Haarahiltunen, Antti; Talvitie, Heli; Savin, Hele; Anttila, O.; Yli-Koski, Marko; Asghar, M. I.; Sin...

Journal of Materials Science: Materials in Electronics

2008

Heterogeneous iron precipitation and gettering in multicrystalline silicon

Referentgranskad

DOI

10.4229/23rdEUPVSEC2008-1CV.2.13

Haarahiltunen, Antti; Savin, Hele; Yli-Koski, Marko; Asghar, M. I.; Sinkkonen, Juha

Proceedings (EU PVSEC)

2008

Gettering in SOI wafers: experimental studies and modeling

Referentgranskad

Istratov, Andrei; Väinölä, Hele; Huber, Walter; Weber, Eicke

Semiconductor Science and Technology

2005

(invited talk) Predictive modeling of transition metal gettering

Istratov, Anderi; Zhang, Peng; Väinölä (Savin), Hele; Haber, Walter; Weber, Eicke

International Symposium on Processing Technology and Market Development of 300mm Si Materials

2003

As-grown iron precipitates and gettering in multicrystalline silicon

Referentgranskad

Haarahiltunen, Antti; Savin, Hele; Yli-Koski, Marko; Talvitie, Heli; Asghar, M. I.; Sinkkonen, Juha

MATERIALS SCIENCE AND ENGINEERING B: ADVANCED FUNCTIONAL SOLID-STATE MATERIALS

2009

(poster) Heterogeneous iron precipitation and gettering in multicrystalline silicon

Haarahiltunen, Antti; Savin, Hele; Yli-Koski, Marko; Asghar, M. I.; Sinkkonen, Juha

Proceedings (EU PVSEC)

2008

Modeling phosphorus diffusion gettering of iron in single crystal silicon

Referentgranskad

Öppen tillgång

Haarahiltunen, Antti; Savin, Hele; Yli-Koski, Marko; Talvitie, Heli; Sinkkonen, Juha

Journal of Applied Physics

2009

Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Referentgranskad

2009

(poster) Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

2008

Predictive modeling of transition metal gettering in silicon

Referentgranskad

2003

Gettering of iron in silicon by boron implantation

Referentgranskad

2008

Heterogeneous iron precipitation and gettering in multicrystalline silicon

Referentgranskad

DOI

10.4229/23rdEUPVSEC2008-1CV.2.13

2008

Gettering in SOI wafers: experimental studies and modeling

Referentgranskad

2005

(invited talk) Predictive modeling of transition metal gettering

2003

As-grown iron precipitates and gettering in multicrystalline silicon

Referentgranskad

2009

(poster) Heterogeneous iron precipitation and gettering in multicrystalline silicon

2008

Modeling phosphorus diffusion gettering of iron in single crystal silicon

Referentgranskad

Öppen tillgång

2009

Resultaten visas 1 - 10 / 102

Sida 1

Publikationer - 102sökresultat

Begränsa sökning

Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

(poster) Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Predictive modeling of transition metal gettering in silicon

Gettering of iron in silicon by boron implantation

Heterogeneous iron precipitation and gettering in multicrystalline silicon

Gettering in SOI wafers: experimental studies and modeling

(invited talk) Predictive modeling of transition metal gettering

As-grown iron precipitates and gettering in multicrystalline silicon

(poster) Heterogeneous iron precipitation and gettering in multicrystalline silicon

Modeling phosphorus diffusion gettering of iron in single crystal silicon

Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

(poster) Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Predictive modeling of transition metal gettering in silicon

Gettering of iron in silicon by boron implantation

Heterogeneous iron precipitation and gettering in multicrystalline silicon

Gettering in SOI wafers: experimental studies and modeling

(invited talk) Predictive modeling of transition metal gettering

As-grown iron precipitates and gettering in multicrystalline silicon

(poster) Heterogeneous iron precipitation and gettering in multicrystalline silicon

Modeling phosphorus diffusion gettering of iron in single crystal silicon

Publikationer - Forskning.fi - 102 results

Publikationer - 102sökresultat

Begränsa sökning

Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

(poster) Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Predictive modeling of transition metal gettering in silicon

Gettering of iron in silicon by boron implantation

Heterogeneous iron precipitation and gettering in multicrystalline silicon

Gettering in SOI wafers: experimental studies and modeling

(invited talk) Predictive modeling of transition metal gettering

As-grown iron precipitates and gettering in multicrystalline silicon

(poster) Heterogeneous iron precipitation and gettering in multicrystalline silicon

Modeling phosphorus diffusion gettering of iron in single crystal silicon

Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

(poster) Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Predictive modeling of transition metal gettering in silicon

Gettering of iron in silicon by boron implantation

Heterogeneous iron precipitation and gettering in multicrystalline silicon

Gettering in SOI wafers: experimental studies and modeling

(invited talk) Predictive modeling of transition metal gettering

As-grown iron precipitates and gettering in multicrystalline silicon

(poster) Heterogeneous iron precipitation and gettering in multicrystalline silicon

Modeling phosphorus diffusion gettering of iron in single crystal silicon