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Publicationer information ikon

Gas Damping in Vibrating MEMS Structures

Veijola, Timo
Elsevier2010Publicationer information ikon

Mems packaging using precision machined LTCC substrates

Referentgranskad
DOI
10.1109/OMEMS.2003.1233477
Heikkinen, Veli; Aikio, Janne; Alajoki, Teemu; Hiltunen, Jussi; Antti-Jussi, Mattila; Ollila, Jyrki;...
International Conference on Optical MEMS, MOEMS 20032003Publicationer information ikon

Design and modelling issues for high power handling RF MEMS

Referentgranskad
Vähä-Heikkilä, Tauno
2nd RF-MEMS Workshop on Industry Application: RF Power MEMS: Reliability and Applications2007Publicationer information ikon

MMID: Millimetre Wave Identification using RF MEMS and nanocomponents

Tuovinen, Jussi; Vähä-Heikkilä, Tauno
European Microwave Week 20062006Publicationer information ikon

Roll-to-roll manufacturing technologies for flexible MEMS applications

Referentgranskad
DOI
10.1109/OMEMS.2005.1540090
Kololuoma, Terho; Tuomikoski, Markus; Haring, Tomi; Kopola, Harri
Optical MEMS, IEEE/LEOS International Conference on2005Publicationer information ikon

Electrostatic MEMS tunable split-ring resonators for THz filter applications

Referentgranskad
DOI
10.1109/OMN.2013.6659111
Han, Zhengli; Kohno, Kenta; Haatainen, Tomi; Mäkelä, Tapio; Fujita, Hiroyuki; Hirakawa, Kazuhiko; To...
International Conference on Optical MEMS and Nanophotonics 20132013Publicationer information ikon

Low operation voltage non self-emissive MEMS color filter pixels

Referentgranskad
DOI
10.1109/OMEMS.2008.4607856
Lo, Chengyao; Hast, Jukka; Huttunen, Olli-Heikki; Petäjä, Jarno; Hiitola-Keinänen, Johanna; Maaninen...
IEEE Institute of Electrical and Electronic Engineers2008Publicationer information ikon

MEMS lithography

Referentgranskad
Franssila, Sami; Tuomikoski, Santeri
Elsevier2015Publicationer information ikon

MEMS Reliability

Referentgranskad
DOI
10.1016/B978-0-323-29965-7.00041-5
Li, Jue; Mattila, Toni; Vuorinen, Vesa
Elsevier2015Publicationer information ikon

Thermal analysis of LTCC packaged MEMS atomic clock

Referentgranskad
Chutani, R.; Galliou, S.; Passilly, N.; Gorecki, C.; Sitomaniemi, Aila; Heikkinen, Mikko; Kautio, Ka...
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 20122012

Gas Damping in Vibrating MEMS Structures

2010

Mems packaging using precision machined LTCC substrates

Referentgranskad
DOI
10.1109/OMEMS.2003.1233477
2003

Design and modelling issues for high power handling RF MEMS

Referentgranskad
2007

MMID: Millimetre Wave Identification using RF MEMS and nanocomponents

2006

Roll-to-roll manufacturing technologies for flexible MEMS applications

Referentgranskad
DOI
10.1109/OMEMS.2005.1540090
2005

Electrostatic MEMS tunable split-ring resonators for THz filter applications

Referentgranskad
DOI
10.1109/OMN.2013.6659111
2013

Low operation voltage non self-emissive MEMS color filter pixels

Referentgranskad
DOI
10.1109/OMEMS.2008.4607856
2008

MEMS lithography

Referentgranskad
2015

MEMS Reliability

Referentgranskad
DOI
10.1016/B978-0-323-29965-7.00041-5
2015

Thermal analysis of LTCC packaged MEMS atomic clock

Referentgranskad
2012