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Simulations of Iron Re-Dissolution from Oxygen Precipitates in Cz-Silicon and its Impact on Gettering Efficiency

Referentgranskad
Väinölä, H.; Zhang, P.; Haarahiltunen, A.; Istratov, A. A.; Weber, E. R.
Solid State Phenomena2004Publicationer information ikon

(poster) Simulations of Iron Re-Dissolution from Oxygen Precipitates in Cz-Silicon and its Impact on Gettering Efficiency

Väinölä, H.; Zhang, Peng; Haarahiltunen, A.; Istratov, A. A.; Weber, E. R.
Conference on gettering and defect engineering in semiconductor technology2003Publicationer information ikon

Sensitive copper detection in p-type CZ-silicon using µ-PCD

Referentgranskad
Väinölä, Hele; Yli-Koski, Marko; Haarahiltunen, Antti; Sinkkonen, Juha
Journal of the Electrochemical Society2003Publicationer information ikon

Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Referentgranskad
Asghar, M. I.; Yli-Koski, M.; Savin, H.; Haarahiltunen, A.; Talvitie, H.; Sinkkonen, Juha
MATERIALS SCIENCE AND ENGINEERING B: ADVANCED FUNCTIONAL SOLID-STATE MATERIALS2009Publicationer information ikon

Gettering of iron in CZ-silicon by polysilicon layer

Referentgranskad
DOI
10.1002/pssc.201000194
Haarahiltunen, Antti; Yli-Koski, Marko; Talvitie, Heli; Vähänissi, Ville; Lindroos, Jeanette; Savin,...
PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS2011Publicationer information ikon

(poster) Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Asghar, M. I.; Yli-Koski, M.; Savin, H.; Haarahiltunen, A.; Talvitie, H.; Sinkkonen, Juha
European Materials Research Society Spring Meeting2008Publicationer information ikon

(poster) Gettering of iron in CZ-silicon by polysilicon layer

Haarahiltunen, Antti; Yli-Koski, Marko; Talvitie, Heli; Vähänissi, Ville; Lindroos, Jeanette; Savin,...
European Materials Research Society Spring Meeting2010Publicationer information ikon

(poster) Fast room-temperature removal of light induced degradation in Cz-silicon

Boulfrad, Yacine; Yli-Koski, Marko; Haarahiltunen, Antti; Savin, Hele
International Conference on Crystalline Silicon Solar Cells2012Publicationer information ikon

(oral talk) Sensitive copper detection in p-type CZ-silicon using µ-PCD

Väinölä (Savin), Hele; Yli-Koski, Marko; Haarahiltunen, Antti; Sinkkonen, Juha
Electrochemical Society Meeting2002Publicationer information ikon

Measurements and simulations of silicon semi 3D radiation detectors

Referentgranskad
DOI
10.1016/j.nima.2006.07.014
Kalliopuska, Juha; Eränen, Simo
Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detecto...2006

Simulations of Iron Re-Dissolution from Oxygen Precipitates in Cz-Silicon and its Impact on Gettering Efficiency

Referentgranskad
2004

(poster) Simulations of Iron Re-Dissolution from Oxygen Precipitates in Cz-Silicon and its Impact on Gettering Efficiency

2003

Sensitive copper detection in p-type CZ-silicon using µ-PCD

Referentgranskad
2003

Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

Referentgranskad
2009

Gettering of iron in CZ-silicon by polysilicon layer

Referentgranskad
DOI
10.1002/pssc.201000194
2011

(poster) Competitive iron gettering between internal gettering sites and boron implantation in CZ-silicon

2008

(poster) Gettering of iron in CZ-silicon by polysilicon layer

2010

(poster) Fast room-temperature removal of light induced degradation in Cz-silicon

2012

(oral talk) Sensitive copper detection in p-type CZ-silicon using µ-PCD

2002

Measurements and simulations of silicon semi 3D radiation detectors

Referentgranskad
DOI
10.1016/j.nima.2006.07.014
2006