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Fully integrated FBAR sensor matrix for mass detection

Referentgranskad
DOI
10.1016/j.proche.2009.07.262
Tukkiniemi, Kari; Rantala, Arto; Nirschl, M.; Pitzer, D.; Huber, T.; Schreiter, M.
Procedia Chemistry2009

Low noise 0.9 GHz FBAR clock

Referentgranskad
DOI
10.1109/NORCHP.2005.1597038
Åberg, Markku; Ylimaula, Miikka; Ylilammi, Markku; Pensala, Tuomas; Rantala, Arto
23rd Norchip Conference, IEEE NORCHIP 20052005

Start-up robustness against resonator-Qs defects in a 2-GHz FBAR VCO

Referentgranskad
DOI
10.1109/FCS.2012.6243615
Östman, Kim; Valkama, Mikko
IEEE International Frequency Control Symposium2012

ZnO for thin film BAW devices

Referentgranskad
DOI
10.1109/ULTSYM.2005.1603221
Molarius, Jyrki; Pensala, Tuomas; Nurmela, Arto; Ylilammi, Markku; Dommann, A.
Proceedings - IEEE Ultrasonics Symposium2005

Shear mode FBARs as highly sensitive liquid biosensors

Referentgranskad
DOI
10.1016/j.sna.2006.01.005
Weber, Jan; Albers, Martin; Tuppurainen, Jussipekka; Link, Mathias; Gabl, Reinhard; Wersing, Wolfram...
Sensors and Actuators A: Physical2006

Spurious resonance suppression in ZnO based thin-film BAW resonators: FEM modeling and experiment

Referentgranskad
DOI
10.1109/ULTSYM.2005.1603229
Pensala, Tuomas; Ylilammi, Markku; Makkonen, Tapani
Proceedings - IEEE Ultrasonics Symposium2005

A High-kt2 Switchable Ferroelectric Al0.7Sc0.3N Film Bulk Acoustic Resonator

Referentgranskad
DOI
10.1109/IFCS-ISAF41089.2020.9234831
Wang, Jialin; Park, Mingyo; Mertin, Stefan; Pensala, Tuomas; Ayazi, Farrokh; Ansari, Azadeh
IEEE International Symposium on Applications of Ferroelectrics (ISAF)2020

A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films

Referentgranskad
DOI
10.1109/JMEMS.2020.3014584
Wang, Jialin; Park, Mingyo; Mertin, Stefan; Pensala, Tuomas; Ayazi, Farrokh; Ansari, Azadeh
Journal of Microelectromechanical Systems2020

CMOS-integrated film bulk acoustic resonators for label-free biosensing

Referentgranskad
Öppen tillgång
DOI
10.3390/s100504180
Nirschl, Martin; Rantala, Arto; Tukkiniemi, Kari; Auer, Sanna; Hellgren, Ann-Charlotte; Pitzer, Dana...
Sensors2010

Fully integrated FBAR sensor matrix for mass detection

Referentgranskad
DOI
10.1016/j.proche.2009.07.262
2009

Low noise 0.9 GHz FBAR clock

Referentgranskad
DOI
10.1109/NORCHP.2005.1597038
2005

Start-up robustness against resonator-Qs defects in a 2-GHz FBAR VCO

Referentgranskad
DOI
10.1109/FCS.2012.6243615
2012

ZnO for thin film BAW devices

Referentgranskad
DOI
10.1109/ULTSYM.2005.1603221
2005

Shear mode FBARs as highly sensitive liquid biosensors

Referentgranskad
DOI
10.1016/j.sna.2006.01.005
2006

Spurious resonance suppression in ZnO based thin-film BAW resonators: FEM modeling and experiment

Referentgranskad
DOI
10.1109/ULTSYM.2005.1603229
2005

A High-kt2 Switchable Ferroelectric Al0.7Sc0.3N Film Bulk Acoustic Resonator

Referentgranskad
DOI
10.1109/IFCS-ISAF41089.2020.9234831
2020

A Film Bulk Acoustic Resonator Based on Ferroelectric Aluminum Scandium Nitride Films

Referentgranskad
DOI
10.1109/JMEMS.2020.3014584
2020

CMOS-integrated film bulk acoustic resonators for label-free biosensing

Referentgranskad
Öppen tillgång
DOI
10.3390/s100504180
2010