This project is targeted as a renewal of nanoelectromechanical systems (NEMS) research by studying a novel NEMS latching switch. This project aims firstly to present a NEMS demonstrator that outperforms current state-of-the-art switches and secondly, as a test structure for studying nanoscale phenomena. The NEMS latching switch functions by exploiting a quantum mechanical effect observed at the nanoscale called the Casimir force. The switch will be actuated by means of piezoelectric aluminium nitride that is deposited on the vertical surfaces. This study will focus on modelling and design, nanofabrication of nanobeam structure, and performance characterization of the novel NEMS switch. This research will be carried out at Aalto University and will utilize OtaNano research infrastructure, including Micronova and the Nanomicroscopy center.

2023

2027